Clean room

With procedures based on microsystem technology, Fraunhofer IPM develops functional materials and surfaces for thermoelectrics, optics and sensor technology as MEMS (micro-electro-mechanical systems) or MOEMS ( micro-optoelectro-mechanical systems). Using thin-layer and thick-layer technology, we implement semiconducting layers, flexible electronic or microoptical components application-specifically.

Our employees have a lot of experience in dealing with a broad variety of materials:

• thermoelectrical materials as Bi₂Te₃, PbTe or SiGe
• gas sensitive metal oxides as SnO₂, Cr_2-xTi_xO_3+z, WO₃ or MoO₃
• metals as Au, Pt, W, Ti or Ta
• conductive transparent layers (TCOs) as ITO
• anti reflexion layers as MgF₂ or ZnSe
• gasochromic materials as rhodium complex or WO₃
• nonlinear optical materials as LiNbO₃
• magnetocaloric and electrocaloric materials